Assignee
PATRICK ROGER
US4 patents
Top patents by PatentIndex Score
US8221582B2Jul 17, 2012
Clamped monolithic showerhead electrode
PATRICK ROGER67 citations97
US8414719B2Apr 9, 2013
Clamped monolithic showerhead electrode
PATRICK ROGER13 citations83
US8216418B2Jul 10, 2012
Electrode assembly and plasma processing chamber utilizing thermally conductive gasket and o-rings
PATRICK ROGER13 citations82
US8187413B2May 29, 2012
Electrode assembly and plasma processing chamber utilizing thermally conductive gasket
PATRICK ROGER5 citations60