Assignee
PAZIDIS ALEXANDRA
DE4 patents
Top patents by PatentIndex Score
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Projection system with compensation of intensity variations and compensation element therefor
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US8488103B2Jul 16, 2013
Optical element for reflection of UV radiation, method for manufacturing the same and projection exposure apparatus comprising the same
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US8435726B2May 7, 2013
Method of processing an optical element and an optical element, in particular for a microlithographic projection exposure apparatus
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US8339575B2Dec 25, 2012
Off-axis objectives with rotatable optical element
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