Assignee
PEAK SYSTEMS INC
US·8 granted patents·352 citations·filing 1986–1991
Top patents by PatentIndex Score
8 records- 0183US4820906ALong arc lamp for semiconductor heatingPEAK SYSTEMS INC·Filed 1987·Granted Apr 11, 1989·37 cites·4 claims
- 0282US4984902AApparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processingPEAK SYSTEMS INC·Filed 1990·Granted Jan 15, 1991·98 cites·7 claims
- 0381US4969748AApparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processingPEAK SYSTEMS INC·Filed 1989·Granted Nov 13, 1990·66 cites·7 claims
- 0470US5073698AMethod for selectively heating a film on a substratePEAK SYSTEMS INC·Filed 1990·Granted Dec 17, 1991·55 cites·14 claims
- 0568US4727297AArc lamp power supplyPEAK SYSTEMS INC·Filed 1986·Granted Feb 23, 1988·29 cites·28 claims
- 0666US4808059AApparatus and method for transferring workpiecesPEAK SYSTEMS INC·Filed 1986·Granted Feb 28, 1989·38 cites·1 claims
- 0745US5047611AMethod for selectively curing a film on a substratePEAK SYSTEMS INC·Filed 1990·Granted Sep 10, 1991·13 cites·5 claims
- 0841US5221142AMethod and apparatus for temperature measurement using thermal expansionPEAK SYSTEMS INC·Filed 1991·Granted Jun 22, 1993·16 cites·3 claims
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