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PEASE JOHN
US4 patents
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US9307578B2Apr 5, 2016
System and method for monitoring temperatures of and controlling multiplexed heater array
PEASE JOHN43 citations93
US8809747B2Aug 19, 2014
Current peak spreading schemes for multiplexed heated array
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US9324589B2Apr 26, 2016
Multiplexed heater array using AC drive for semiconductor processing
PEASE JOHN13 citations76
US9074285B2Jul 7, 2015
Systems for detecting unconfined-plasma events
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