Assignee
PEIJSTER JERRY JOHANNES MARTINUS
NL·7 granted patents·5 citations·filing 2012–2012
Top patents by PatentIndex Score
7 records- 0167US9268216B2Projection system with flexible couplingPEIJSTER JERRY JOHANNES MARTINUS·Filed 2012·Granted Feb 23, 2016·2 cites·30 claims
- 0263US9703213B2Substrate processing apparatusPEIJSTER JERRY JOHANNES MARTINUS·Filed 2012·Granted Jul 11, 2017·1 cites·33 claims
- 0362US9030649B2Target positioning device, method for driving a target positioning device, and a lithography system comprising such a target positioning devicePEIJSTER JERRY JOHANNES MARTINUS·Filed 2012·Granted May 12, 2015·1 cites·19 claims
- 0461US9939728B2Vacuum chamber with a thick aluminum base platePEIJSTER JERRY JOHANNES MARTINUS·Filed 2012·Granted Apr 10, 2018·1 cites·19 claims
- 0547US8905369B2Vibration isolation module and substrate processing systemPEIJSTER JERRY JOHANNES MARTINUS·Filed 2012·Granted Dec 9, 2014·0 cites·19 claims
- 0646US9163664B2Guidance for target processing toolPEIJSTER JERRY JOHANNES MARTINUS·Filed 2012·Granted Oct 20, 2015·0 cites·30 claims
- 0743US9199829B2Assembly and a method for lifting a module of a lithography system in a vertical direction and a lithography system comprising such assemblyPEIJSTER JERRY JOHANNES MARTINUS·Filed 2012·Granted Dec 1, 2015·0 cites·29 claims
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