Assignee
PENG JUI-CHUN
TW4 patents
Top patents by PatentIndex Score
US8955530B2Feb 17, 2015
System and method for cleaning a wafer chuck
PENG JUI-CHUN2 citations60
US8237132B2Aug 7, 2012
Method and apparatus for reducing down time of a lithography system
PENG JUI-CHUN2 citations60
US9632426B2Apr 25, 2017
In-situ immersion hood cleaning
PENG JUI-CHUN1 citations50
US9282592B2Mar 8, 2016
Rotatable heating-cooling plate and element in proximity thereto
PENG JUI-CHUN0 citations46