Assignee

PENG JUI-CHUNG

TW2 patents

Top patents by PatentIndex Score

US8199314B2Jun 12, 2012

System and method for improving immersion scanner overlay performance

PENG JUI-CHUNG12 citations81

US8068208B2Nov 29, 2011

System and method for improving immersion scanner overlay performance

PENG JUI-CHUNG5 citations71