Assignee

PENSALA TUOMAS

FI·2 granted patents·40 citations·filing 2010–2012

Technology mixH03H2 B81B1 H01L1 H10N1 Y10T1

Top patents by PatentIndex Score

2 records

0193US8916942B2Microelectromechanical resonator and a method for producing the samePENSALA TUOMAS·Filed 2010·Granted Dec 23, 2014·21 cites·14 claims
0291US9559660B2Micromechanical devices comprising n-type doping agentsPENSALA TUOMAS·Filed 2012·Granted Jan 31, 2017·19 cites·40 claims

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