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PFORR RAINER
DE3 patents
Top patents by PatentIndex Score
US10157804B2Dec 18, 2018
Method and apparatus for determining a critical dimension variation of a photolithographic mask
PFORR RAINER2 citations71
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Method and apparatus for minimizing overlay errors in lithography
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US8871409B2Oct 28, 2014
Lithographic targets for uniformity control
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