Assignee
PHILLIPS ALTON H
US·9 granted patents·4 pending applications·23 citations·filing 1999–2012
Top patents by PatentIndex Score
13 records- 0188US8284379B2Devices and methods for reducing residual reticle chucking forcesPHILLIPS ALTON H·Filed 2008·Granted Oct 9, 2012·10 cites·37 claims
- 0269US8794011B2Method and apparatus for utilizing in-situ measurements techniques in conjunction with thermoelectric chips (TECs)PHILLIPS ALTON H·Filed 2011·Granted Aug 5, 2014·2 cites·29 claims
- 0361US8739383B2Method and apparatus for aligning mirror blocks of a multi-element mirror assemblyPHILLIPS ALTON H·Filed 2010·Granted Jun 3, 2014·1 cites·11 claims
- 0456US9041904B2High heat load optics with a liquid metal interface for use in an extreme ultraviolet lithography systemPHILLIPS ALTON H·Filed 2011·Granted May 26, 2015·0 cites·20 claims
- 0554US2010186942A1Reticle error reduction by coolingPHILLIPS ALTON H·Filed 2009·Application pending·0 cites
- 0652US9041900B2High heat load optics with a liquid metal interface for use in an extreme ultraviolet lithography systemPHILLIPS ALTON H·Filed 2008·Granted May 26, 2015·0 cites·28 claims
- 0749US9323157B2Mirror assembly for an exposure apparatusPHILLIPS ALTON H·Filed 2012·Granted Apr 26, 2016·0 cites·25 claims
- 0847US9304385B2Exposure method and device manufacturing method including selective deformation of a maskPHILLIPS ALTON H·Filed 2009·Granted Apr 5, 2016·0 cites·20 claims
- 0947US2012120379A1System and method for controlling the distortion of a reticlePHILLIPS ALTON H·Filed 2011·Application pending·0 cites
- 1046US10114193B2Fly's eye optical mirror with a plurality of optical elements rotationally aligned along two axesPHILLIPS ALTON H·Filed 2011·Granted Oct 30, 2018·0 cites·29 claims
- 1141US6021783ABraid removal toolPHILLIPS ALTON H·Filed 1999·Granted Feb 8, 2000·10 cites·18 claims
- 1240US2007211232A1Thermophoretic Techniques for Protecting Reticles from ContaminantsPHILLIPS ALTON H·Filed 2004·Application pending·0 cites
- 1340US2014176931A1Intermittent temperature control of movable optical elementsPHILLIPS ALTON H·Filed 2012·Application pending·0 cites
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