Assignee

PINCHART AUDREY

FR·1 granted patent·4 citations·filing 2008–2008

Technology mixC23C1 H10F1 H10P1 Y02P1

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0161US8324014B2Process for depositing boron compounds by CVD or PVDPINCHART AUDREY·Filed 2008·Granted Dec 4, 2012·4 cites·21 claims

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