Assignee
PIRK TJALF
DE11 patents
Top patents by PatentIndex Score
US8528591B2Sep 10, 2013
Micro valve, method for producing a micro valve, as well as micro pump
PIRK TJALF13 citations82
US9941507B2Apr 10, 2018
Method and apparatus for production of a thin-film battery
PIRK TJALF6 citations65
US8847336B2Sep 30, 2014
Micromechanical component having an inclined structure and corresponding manufacturing method
PIRK TJALF2 citations61
US8581470B2Nov 12, 2013
Electrode comb, micromechanical component, and method for producing an electrode comb or a micromechanical component
PIRK TJALF2 citations61
US9829357B2Nov 28, 2017
Microelectromechanical sensor module and corresponding production method
PIRK TJALF0 citations51
US8993356B2Mar 31, 2015
Method for constructing an electrical circuit, and electrical circuit
PIRK TJALF0 citations50
US9608307B2Mar 28, 2017
Semiconductor substrate-based system for an RFID device, RFID device, and method for manufacturing such a semiconductor substrate-based system
PIRK TJALF0 citations48
US9590250B2Mar 7, 2017
Layer system, energy store, and method for manufacturing an energy store
PIRK TJALF0 citations45
US9478826B2Oct 25, 2016
Layer configuration
PIRK TJALF0 citations41
US9195054B2Nov 24, 2015
Cascaded micromechanical actuator structure
PIRK TJALF0 citations40
US8629635B2Jan 14, 2014
Methods for operating an electrostatic drive, and electrostataic drives
PIRK TJALF0 citations39