Assignee
PLASMA THERM LLC
US28 patents
Top patents by PatentIndex Score
US8785332B2Jul 22, 2014
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC15 citations92
US8691702B2Apr 8, 2014
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC13 citations83
US9070760B2Jun 30, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC3 citations74
US10818552B2Oct 27, 2020
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC3 citations69
US10269641B2Apr 23, 2019
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC1 citations69
US9911654B2Mar 6, 2018
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC1 citations63
US9105705B2Aug 11, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC1 citations63
US8980764B2Mar 17, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC1 citations63
US8796154B2Aug 5, 2014
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC2 citations63
US12489018B2Dec 2, 2025
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations62
US11908741B1Feb 20, 2024
Protective coating for plasma dicing
PLASMA THERM LLC0 citations62
US11747494B2Sep 5, 2023
Ion filter using aperture plate with plurality of zones
PLASMA THERM LLC1 citations62
US11587834B1Feb 21, 2023
Protective coating for plasma dicing
PLASMA THERM LLC1 citations62
US11488865B2Nov 1, 2022
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations62
US9343365B2May 17, 2016
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC2 citations61
US11651999B2May 16, 2023
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations58
US9082839B2Jul 14, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC3 citations58
US10573557B2Feb 25, 2020
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations52
US10297427B2May 21, 2019
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations52
US9202720B2Dec 1, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations52
US10707060B2Jul 7, 2020
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations51
US9202721B2Dec 1, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations51
US8946058B2Feb 3, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations51
US11075057B2Jul 27, 2021
Device for treating an object with plasma
PLASMA THERM LLC0 citations49
US10497621B2Dec 3, 2019
Method for dicing a substrate with back metal
PLASMA THERM LLC0 citations48
US9368404B2Jun 14, 2016
Method for dicing a substrate with back metal
PLASMA THERM LLC0 citations48
US9202737B2Dec 1, 2015
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA THERM LLC0 citations48
US10943825B2Mar 9, 2021
Method for dicing die attach film
PLASMA THERM LLC0 citations45