Assignee
PLASMA-THERM LLC
US6 patents
Top patents by PatentIndex Score
US9711406B2Jul 18, 2017
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA-THERM LLC6 citations84
US9564366B2Feb 7, 2017
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA-THERM LLC1 citations63
US10741447B2Aug 11, 2020
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA-THERM LLC0 citations52
US9496177B2Nov 15, 2016
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA-THERM LLC0 citations52
USRE46339EMar 14, 2017
Method and apparatus for plasma dicing a semi-conductor wafer
PLASMA-THERM LLC0 citations51
US9865436B1Jan 9, 2018
Powered anode for ion source for DLC and reactive processes
PLASMA-THERM LLC0 citations45