Assignee
PLASMART CO LTD
KR·3 granted patents·65 citations·filing 2004–2008
Top patents by PatentIndex Score
3 records- 0194US8053991B2Impedance matching methods and systems performing the samePLASMART CO LTD·Filed 2008·Granted Nov 8, 2011·39 cites·33 claims
- 0287US7088047B2Inductively coupled plasma generator having low aspect ratioPLASMART CO LTD·Filed 2005·Granted Aug 8, 2006·12 cites·4 claims
- 0378US7079085B2Antenna structure for inductively coupled plasma generatorPLASMART CO LTD·Filed 2004·Granted Jul 18, 2006·14 cites·11 claims
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