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PLETTNER TOMAS

US2 patents

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US9053833B2Jun 9, 2015

DC high-voltage super-radiant free-electron based EUV source

PLETTNER TOMAS6 citations69

US8618513B2Dec 31, 2013

Apparatus and methods for forming an electrical conduction path through an insulating layer

PLETTNER TOMAS4 citations59