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PLUMHOFF JASON

3 patents

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US7867403B2Jan 11, 2011

Temperature control method for photolithographic substrate

PLUMHOFF JASON2 citations57

US7749400B2Jul 6, 2010

Method for etching photolithographic substrates

PLUMHOFF JASON0 citations42

US8187483B2May 29, 2012

Method to minimize CD etch bias

PLUMHOFF JASON0 citations37