Assignee
POIS HEATH A
US·3 granted patents·50 citations·filing 2014–2017
Top patents by PatentIndex Score
3 records- 0197US9588066B2Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)POIS HEATH A·Filed 2014·Granted Mar 7, 2017·44 cites·10 claims
- 0288US9952166B2Silicon germanium thickness and composition determination using combined XPS and XRF technologiesPOIS HEATH A·Filed 2017·Granted Apr 24, 2018·3 cites·20 claims
- 0387US9594035B2Silicon germanium thickness and composition determination using combined XPS and XRF technologiesPOIS HEATH A·Filed 2015·Granted Mar 14, 2017·3 cites·10 claims
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