Assignee
PORE VILJAMI
FI3 patents
Top patents by PatentIndex Score
US9315896B2Apr 19, 2016
Synthesis and use of precursors for ALD of group VA element containing thin films
PORE VILJAMI16 citations92
US9175390B2Nov 3, 2015
Synthesis and use of precursors for ALD of tellurium and selenium thin films
PORE VILJAMI8 citations83
US8945675B2Feb 3, 2015
Methods for forming conductive titanium oxide thin films
PORE VILJAMI3 citations62