Individual holder
POVOLNY HENRY S
US·2 granted patents·14 citations·filing 2009–2011
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
2 records- 0184US8454027B2Adjustable thermal contact between an electrostatic chuck and a hot edge ring by clocking a coupling ringPOVOLNY HENRY S·Filed 2009·Granted Jun 4, 2013·11 cites·24 claims
- 0273US8832916B2Methods of dechucking and system thereofPOVOLNY HENRY S·Filed 2011·Granted Sep 16, 2014·3 cites·10 claims
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