Assignee
PRE TECH CO LTD
JP·5 granted patents·265 citations·filing 1996–1998
Top patents by PatentIndex Score
5 records- 0182US5733434AApparatus and method for cleaning semiconductor wafersPRE TECH CO LTD·Filed 1996·Granted Mar 31, 1998·83 cites·14 claims
- 0279US6003527ACleaning apparatus and a cleaning methodPRE TECH CO LTD·Filed 1997·Granted Dec 21, 1999·61 cites·23 claims
- 0377US5725753AApparatus and method for cleaning semiconductor wafersPRE TECH CO LTD·Filed 1996·Granted Mar 10, 1998·55 cites·19 claims
- 0471US5927305ACleaning apparatusPRE TECH CO LTD·Filed 1997·Granted Jul 27, 1999·49 cites·3 claims
- 0550US6050276AApparatus and method for cleaning a precision substratePRE TECH CO LTD·Filed 1998·Granted Apr 18, 2000·17 cites·13 claims
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