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PREIKSZAS DIRK
DE9 patents
Top patents by PatentIndex Score
US8304750B2Nov 6, 2012
Scanning charged particle beams
PREIKSZAS DIRK51 citations92
US8129693B2Mar 6, 2012
Charged particle beam column and method of operating same
PREIKSZAS DIRK19 citations92
US8405045B2Mar 26, 2013
Particle beam device with deflection system
PREIKSZAS DIRK8 citations82
US11139140B2Oct 5, 2021
Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus
PREIKSZAS DIRK2 citations72
US9093246B2Jul 28, 2015
SACP method and particle optical system for performing the method
PREIKSZAS DIRK5 citations72
US8217350B2Jul 10, 2012
Particle optical arrangement
PREIKSZAS DIRK2 citations62
US8558190B2Oct 15, 2013
Charged particle beam column and method of operating same
PREIKSZAS DIRK0 citations51
US8421028B2Apr 16, 2013
Device for deflecting or guiding in a particle beam
PREIKSZAS DIRK1 citations51
US8063364B2Nov 22, 2011
Particle optical device with magnet assembly
PREIKSZAS DIRK0 citations48