Assignee
PROGRESSIVE SYS TECH INC
US·6 granted patents·238 citations·filing 1994–1998
Top patents by PatentIndex Score
6 records- 0182US5853214AAligner for a substrate carrierPROGRESSIVE SYS TECH INC·Filed 1995·Granted Dec 29, 1998·87 cites·50 claims
- 0277US6077026AProgrammable substrate support for a substrate positioning systemPROGRESSIVE SYS TECH INC·Filed 1998·Granted Jun 20, 2000·53 cites·17 claims
- 0377US5785186ASubstrate housing and docking systemPROGRESSIVE SYS TECH INC·Filed 1994·Granted Jul 28, 1998·55 cites·39 claims
- 0455US5823361ASubstrate support apparatus for a substrate housingPROGRESSIVE SYS TECH INC·Filed 1996·Granted Oct 20, 1998·17 cites·28 claims
- 0550US5664926AStage assembly for a substrate processing systemPROGRESSIVE SYS TECH INC·Filed 1995·Granted Sep 9, 1997·20 cites·20 claims
- 0633US5834915ASustrate housing and docking systemPROGRESSIVE SYS TECH INC·Filed 1996·Granted Nov 10, 1998·6 cites·29 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →