Assignee
PSI STAR INC
US17 patents
Top patents by PatentIndex Score
US4632727ADec 30, 1986
Copper etching process and solution
PSI STAR INC31 citations92
US4556449ADec 3, 1985
Nickel etching process and solution
PSI STAR INC28 citations92
US4466859AAug 21, 1984
Process for etching copper
PSI STAR INC28 citations92
US4482425ANov 13, 1984
Liquid etching reactor and method
PSI STAR INC33 citations90
US4711767ADec 8, 1987
Plasma reactor with voltage transformer
PSI STAR INC28 citations85
US4497687AFeb 5, 1985
Aqueous process for etching cooper and other metals
PSI STAR INC20 citations81
US4468284AAug 28, 1984
Process for etching an aluminum-copper alloy
PSI STAR INC23 citations81
US4695348ASep 22, 1987
Copper etching process and product
PSI STAR INC21 citations80
US4545850AOct 8, 1985
Regenerative copper etching process and solution
PSI STAR INC11 citations73
US4543153ASep 24, 1985
Process and apparatus for etching copper masked by a nickel-gold mask
PSI STAR INC14 citations73
US4451327AMay 29, 1984
Process and structure for etching copper
PSI STAR INC13 citations73
US4927700AMay 22, 1990
Copper etching process and product with controlled nitrous acid reaction
PSI STAR INC6 citations72
US4846918AJul 11, 1989
Copper etching process and product with controlled nitrous acid reaction
PSI STAR INC14 citations72
US4767661AAug 30, 1988
Copper etching process and product
PSI STAR INC13 citations72
US4767662AAug 30, 1988
Copper etching process and product
PSI STAR INC8 citations72
US4600563AJul 15, 1986
Plasma reactor with voltage transformer
PSI STAR INC20 citations69
US4904339AFeb 27, 1990
Vertical spray etch reactor and method
PSI STAR INC11 citations63