Assignee
PSK INC
KR·28 granted patents·43 pending applications·65 citations·filing 2009–2025
Top patents by PatentIndex Score
71 records- 0191US8007218B2Unit and method for transferring substrates and apparatus and method for treating substrates with the unitPSK INC·Filed 2009·Granted Aug 30, 2011·33 cites·14 claims
- 0288US10109459B1Substrate treating apparatus, substrate treating method, and plasma generating unitPSK INC·Filed 2017·Granted Oct 23, 2018·7 cites·23 claims
- 0386US9779918B2Substrate treating apparatus and methodPSK INC·Filed 2014·Granted Oct 3, 2017·12 cites·12 claims
- 0484US11302558B2Substrate processing apparatus and substrate transfer methodPSK INC·Filed 2020·Granted Apr 12, 2022·2 cites·16 claims
- 0572US11139152B2Substrate processing apparatusPSK INC·Filed 2019·Granted Oct 5, 2021·1 cites·12 claims
- 0671US11817291B2Faraday shield and apparatus for treating substratePSK INC·Filed 2021·Granted Nov 14, 2023·1 cites·16 claims
- 0770US9508541B2Apparatus and method for treating substratePSK INC·Filed 2014·Granted Nov 29, 2016·3 cites·9 claims
- 0866US10395898B2Substrate treating apparatus, substrate treating method, and plasma generating unitPSK INC·Filed 2017·Granted Aug 27, 2019·1 cites·11 claims
- 0960US10964565B2Substrate processing apparatus and methodPSK INC·Filed 2019·Granted Mar 30, 2021·1 cites·17 claims
- 1059US2024087843A1Apparatus for treating substrate and method for treating substratePSK INC·Filed 2023·Application pending·0 cites
- 1156US9945570B2Unit and method for cooling, and apparatus and method for treating substratePSK INC·Filed 2014·Granted Apr 17, 2018·1 cites·14 claims
- 1256US9214357B1Substrate treating apparatus and methodPSK INC·Filed 2014·Granted Dec 15, 2015·1 cites·8 claims
- 1356US2024079216A1Apparatus for treating substrate and method for treating substratePSK INC·Filed 2023·Application pending·0 cites
- 1454US10109466B2Support unit and apparatus for treating substratePSK INC·Filed 2014·Granted Oct 23, 2018·2 cites·19 claims
- 1554US2024087854A1Apparatus for treating substrate and method for treating substratePSK INC·Filed 2023·Application pending·0 cites
- 1653US2024071783A1Apparatus for treating substratePSK INC·Filed 2023·Application pending·0 cites
- 1753US2025308922A1Substrate processing method and substrate processing apparatusPSK INC·Filed 2025·Application pending·0 cites
- 1853US2026018389A1Substrate treatment apparatus and substrate treatment methodPSK INC·Filed 2022·Application pending·0 cites
- 1953US2025308921A1Substrate processing apparatus and substrate processing methodPSK INC·Filed 2025·Application pending·0 cites
- 2052US2026018420A1Substrate processing methodPSK INC·Filed 2023·Application pending·0 cites
- 2151US12417901B2Apparatus for treating substrate and method for aligning dielectric plate using the samePSK INC·Filed 2021·Granted Sep 16, 2025·0 cites·13 claims
- 2250US2022059324A1Substrate treating apparatusPSK INC·Filed 2021·Application pending·0 cites
- 2349US2015293526A1Substrate Treating Apparatus, Substrate Treating Method, and Recording MediumPSK INC·Filed 2014·Application pending·0 cites
- 2448US2022172954A1Method and apparatus for treating substratePSK INC·Filed 2020·Application pending·0 cites
- 2548US2025006467A1Substrate processing apparatusPSK INC·Filed 2022·Application pending·0 cites
- 2648US2023207262A1Plasma generation unit, and apparatus for treating substrate with the samePSK INC·Filed 2022·Application pending·0 cites
- 2747US12278091B2Substrate processing apparatus and substrate processing methodPSK INC·Filed 2021·Granted Apr 15, 2025·0 cites·17 claims
- 2847US12062525B2Support unit, and apparatus for treating substrate with the samePSK INC·Filed 2022·Granted Aug 13, 2024·0 cites·18 claims
- 2947US9477031B2Apparatus and method for manufacturing light guiding platePSK INC·Filed 2013·Granted Oct 25, 2016·0 cites·6 claims
- 3047US2013319615A1Apparatus and method for treating substratesPSK INC·Filed 2013·Application pending·0 cites
- 3147US2025014867A1Substrate treatment apparatus and substrate treatment methodPSK INC·Filed 2022·Application pending·0 cites
- 3247US2016020070A1Plasma generating apparatus using dual plasma source and substrate treating apparatus including the samePSK INC·Filed 2014·Application pending·0 cites
- 3346US10312060B2Plasma generating apparatus using mutual inductive coupling and substrate treating apparatus comprising the samePSK INC·Filed 2014·Granted Jun 4, 2019·0 cites·14 claims
- 3446US2024055234A1Substrate processing apparatusPSK INC·Filed 2021·Application pending·0 cites
- 3546US2024297023A1Upper electrode unit and substrate processing apparatus including the samePSK INC·Filed 2021·Application pending·0 cites
- 3646US2024274409A1Apparatus for treating substrate and method for aligning dielectric plate using the samePSK INC·Filed 2021·Application pending·0 cites
- 3746US2024078663A1Method for processing substratePSK INC·Filed 2023·Application pending·0 cites
- 3846US2016013029A1Apparatus For Generating Plasma Using Dual Plasma Source And Apparatus For Treating Substrate Including The SamePSK INC·Filed 2014·Application pending·0 cites
- 3945US2024429083A1Apparatus for treating substrate and substrate inspection method in load lock chamberPSK INC·Filed 2023·Application pending·0 cites
- 4045US2017221720A1Apparatus and method for treating substratesPSK INC·Filed 2017·Application pending·0 cites
- 4145US2015136734A1Substrate Treating Apparatus and MethodPSK INC·Filed 2014·Application pending·0 cites
- 4244US12476076B2Substrate processing apparatusPSK INC·Filed 2021·Granted Nov 18, 2025·0 cites·20 claims
- 4344US2024021418A1Apparatus for treating substratePSK INC·Filed 2023·Application pending·0 cites
- 4444US2016013031A1Substrate Processing Device and Method of Handling Particles ThereofPSK INC·Filed 2014·Application pending·0 cites
- 4544US2016020073A1Plasma generation device, method of controlling characteristic of plasma, and substrate processing device using samePSK INC·Filed 2014·Application pending·0 cites
- 4643US9536708B2Plasma generating device, method of controlling the same, and substrate processing device including the plasma generating devicePSK INC·Filed 2014·Granted Jan 3, 2017·0 cites·27 claims
- 4743US2015020974A1Baffle and apparatus for treating surface of baffle, and substrate treating apparatusPSK INC·Filed 2013·Application pending·0 cites
- 4843US2010006226A1Apparatus for generating hollow cathode plasma and apparatus for treating large area substrate using hollow cathode plasmaPSK INC·Filed 2009·Application pending·0 cites
- 4943US2021305015A1Substrate processing apparatusPSK INC·Filed 2021·Application pending·0 cites
- 5043US2014083612A1Baffle and method for treating surface of the baffle, and substrate treating apparatus and method for treating surface of the apparatusPSK INC·Filed 2013·Application pending·0 cites
Showing the top 50 of 71 patent records by PatentIndex Score.
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →