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PSK INC
KR28 patents
Top patents by PatentIndex Score
US8007218B2Aug 30, 2011
Unit and method for transferring substrates and apparatus and method for treating substrates with the unit
PSK INC33 citations88
US10109459B1Oct 23, 2018
Substrate treating apparatus, substrate treating method, and plasma generating unit
PSK INC7 citations81
US9779918B2Oct 3, 2017
Substrate treating apparatus and method
PSK INC12 citations75
US9508541B2Nov 29, 2016
Apparatus and method for treating substrate
PSK INC3 citations68
US11302558B2Apr 12, 2022
Substrate processing apparatus and substrate transfer method
PSK INC2 citations66
US11139152B2Oct 5, 2021
Substrate processing apparatus
PSK INC1 citations60
US10395898B2Aug 27, 2019
Substrate treating apparatus, substrate treating method, and plasma generating unit
PSK INC1 citations57
US10109466B2Oct 23, 2018
Support unit and apparatus for treating substrate
PSK INC2 citations54
US10964565B2Mar 30, 2021
Substrate processing apparatus and method
PSK INC1 citations50
US12417901B2Sep 16, 2025
Apparatus for treating substrate and method for aligning dielectric plate using the same
PSK INC0 citations47
US11817291B2Nov 14, 2023
Faraday shield and apparatus for treating substrate
PSK INC1 citations47
US12278091B2Apr 15, 2025
Substrate processing apparatus and substrate processing method
PSK INC0 citations46
US12062525B2Aug 13, 2024
Support unit, and apparatus for treating substrate with the same
PSK INC0 citations46
US11295933B2Apr 5, 2022
Substrate processing apparatus and substrate processing method
PSK INC0 citations44
US9945570B2Apr 17, 2018
Unit and method for cooling, and apparatus and method for treating substrate
PSK INC1 citations44
US12476076B2Nov 18, 2025
Substrate processing apparatus
PSK INC0 citations42
US11776791B2Oct 3, 2023
Substrate processing apparatus and substrate processing method
PSK INC0 citations42
US9214357B1Dec 15, 2015
Substrate treating apparatus and method
PSK INC1 citations42
US12562346B2Feb 24, 2026
Apparatus for processing substrate
PSK INC0 citations41
US12424417B2Sep 23, 2025
Substrate processing apparatus and substrate processing method
PSK INC0 citations41
US11862434B2Jan 2, 2024
Substrate processing apparatus
PSK INC0 citations41
US9477031B2Oct 25, 2016
Apparatus and method for manufacturing light guiding plate
PSK INC0 citations41
US10312060B2Jun 4, 2019
Plasma generating apparatus using mutual inductive coupling and substrate treating apparatus comprising the same
PSK INC0 citations39
US9536708B2Jan 3, 2017
Plasma generating device, method of controlling the same, and substrate processing device including the plasma generating device
PSK INC0 citations39
US9390957B2Jul 12, 2016
Substrate transfer apparatus and method, and substrate processing apparatus
PSK INC0 citations32
US12531216B2Jan 20, 2026
Support unit and substrate processing apparatus including same
PSK INC0 citations31
US12387911B2Aug 12, 2025
Support unit, apparatus for treating substrate, and method for treating substrate
PSK INC0 citations31
US10309015B2Jun 4, 2019
Substrate treating apparatus and substrate treating method
PSK INC0 citations20