Assignee

PUECH MICHEL

0 granted patents·2 pending applications·0 citations·filing 2003–2003

Technology mixH01J2

Top patents by PatentIndex Score

2 records

0138US2005224178A1Heating jacket for plasma etching reactor, and etching method using samePUECH MICHEL·Filed 2003·Application pending·0 cites
0238US2006060566A1Method and device for substrate etching with very high power inductively coupled plasmaPUECH MICHEL·Filed 2003·Application pending·0 cites

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