Assignee

PUTKONEN MATTI

1 granted patent·57 citations·filing 2004–2004

Technology mixC23C1 H01M1 H10D1 H10P1 Y02E1 Y02P1

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0191US7351658B2Process for producing yttrium oxide thin filmsPUTKONEN MATTI·Filed 2004·Granted Apr 1, 2008·57 cites·17 claims

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