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US7 patents
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US8642135B2Feb 4, 2014
Systems and methods for plasma doping microfeature workpieces
QIN SHU7 citations83
US8324088B2Dec 4, 2012
Sputtering-less ultra-low energy ion implantation
QIN SHU2 citations62
US8709927B2Apr 29, 2014
Methods of implanting dopant ions
QIN SHU0 citations51
US8671879B2Mar 18, 2014
Systems and methods for plasma processing of microfeature workpieces
QIN SHU0 citations51
US8524572B2Sep 3, 2013
Methods of processing units comprising crystalline materials, and methods of forming semiconductor-on-insulator constructions
QIN SHU1 citations51
US8426763B2Apr 23, 2013
Rapid thermal processing systems and methods for treating microelectronic substrates
QIN SHU0 citations51
US8293659B2Oct 23, 2012
Method for fabricating dielectric layer with improved insulating properties
QIN SHU0 citations51