Assignee
QONIAC GMBH
DE·9 granted patents·16 citations·filing 2015–2020
Top patents by PatentIndex Score
9 records- 0184US10234401B2Method of manufacturing semiconductor devices by using sampling plansQONIAC GMBH·Filed 2016·Granted Mar 19, 2019·8 cites·23 claims
- 0277US11092901B2Wafer exposure method using wafer models and wafer fabrication assemblyQONIAC GMBH·Filed 2020·Granted Aug 17, 2021·2 cites·20 claims
- 0374US10739688B2Method and apparatus for fabricating wafer by calculating process correction parametersQONIAC GMBH·Filed 2019·Granted Aug 11, 2020·1 cites·2 claims
- 0474US10310490B2Method and apparatus of evaluating a semiconductor manufacturing processQONIAC GMBH·Filed 2016·Granted Jun 4, 2019·3 cites·10 claims
- 0568US10739685B2Process control method for lithographically processed semiconductor devicesQONIAC GMBH·Filed 2018·Granted Aug 11, 2020·1 cites·15 claims
- 0660US10008422B2Method for assessing the usability of an exposed and developed semiconductor waferQONIAC GMBH·Filed 2015·Granted Jun 26, 2018·1 cites·10 claims
- 0752US11366397B2Method and apparatus for simulation of lithography overlayQONIAC GMBH·Filed 2019·Granted Jun 21, 2022·0 cites·8 claims
- 0838US11181830B2Lithographic apparatus and method of controlling a lithographic apparatusQONIAC GMBH·Filed 2018·Granted Nov 23, 2021·0 cites·18 claims
- 0937US10699971B2Method for processing of a further layer on a semiconductor waferQONIAC GMBH·Filed 2018·Granted Jun 30, 2020·0 cites·22 claims
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