Assignee
QUANTUM GLOBAL TECH LLC
US·14 granted patents·5 pending applications·79 citations·filing 2000–2016
Top patents by PatentIndex Score
19 records- 0184US7624742B1Method for removing aluminum fluoride contamination from aluminum-containing surfaces of semiconductor process equipmentQUANTUM GLOBAL TECH LLC·Filed 2006·Granted Dec 1, 2009·8 cites·9 claims
- 0282US7427330B1Cleaning bench for removing contaminants from semiconductor process equipmentQUANTUM GLOBAL TECH LLC·Filed 2008·Granted Sep 23, 2008·7 cites·4 claims
- 0377US7541094B1Firepolished quartz parts for use in semiconductor processingQUANTUM GLOBAL TECH LLC·Filed 2007·Granted Jun 2, 2009·6 cites·8 claims
- 0474US6637444B1Volume efficient cleaning methodsQUANTUM GLOBAL TECH LLC·Filed 2002·Granted Oct 28, 2003·14 cites·6 claims
- 0573US6530388B1Volume efficient cleaning systemsQUANTUM GLOBAL TECH LLC·Filed 2000·Granted Mar 11, 2003·14 cites·11 claims
- 0667US6648982B1Steam cleaning system and method for semiconductor process equipmentQUANTUM GLOBAL TECH LLC·Filed 2001·Granted Nov 18, 2003·12 cites·13 claims
- 0766US8714166B2Method and apparatus for showerhead cleaningQUANTUM GLOBAL TECH LLC·Filed 2013·Granted May 6, 2014·2 cites·3 claims
- 0863US2014076354A1Removing residues from substrate processing componentsQUANTUM GLOBAL TECH LLC·Filed 2013·Application pending·0 cites
- 0962US7267132B2Methods for removing silicon and silicon-nitride contamination layers from deposition tubesQUANTUM GLOBAL TECH LLC·Filed 2005·Granted Sep 11, 2007·1 cites·11 claims
- 1062US7073522B2Apparatus for applying disparate etching solutions to interior and exterior surfacesQUANTUM GLOBAL TECH LLC·Filed 2005·Granted Jul 11, 2006·1 cites·9 claims
- 1160US2017232784A1System and Method for Cleaning Semiconductor Fabrication Equipment PartsQUANTUM GLOBAL TECH LLC·Filed 2016·Application pending·0 cites
- 1260US2014190937A1System and Method for Cleaning Semiconductor Fabrication Equipment PartsQUANTUM GLOBAL TECH LLC·Filed 2014·Application pending·0 cites
- 1352US7448397B1Apparatus for applying disparate etching solutions to interior and exterior surfacesQUANTUM GLOBAL TECH LLC·Filed 2006·Granted Nov 11, 2008·0 cites·11 claims
- 1452US6936114B1Steam cleaning system and method for semiconductor process equipmentQUANTUM GLOBAL TECH LLC·Filed 2003·Granted Aug 30, 2005·4 cites·22 claims
- 1551US6926016B1System for removing contaminants from semiconductor process equipmentQUANTUM GLOBAL TECH LLC·Filed 2003·Granted Aug 9, 2005·10 cites·21 claims
- 1651US2009218042A1Methods For Producing Quartz Parts With Low Defect And Impurity Densities For Use In Semiconductor ProcessingQUANTUM GLOBAL TECH LLC·Filed 2009·Application pending·0 cites
- 1748US7108002B1Steam cleaning system and method for semiconductor process equipmentQUANTUM GLOBAL TECH LLC·Filed 2005·Granted Sep 19, 2006·0 cites·13 claims
- 1846US2016056061A1Real time liquid particle counter (lpc) end point detection systemQUANTUM GLOBAL TECH LLC·Filed 2015·Application pending·0 cites
- 1941US8372211B2Method and apparatus for showerhead cleaningQUANTUM GLOBAL TECH LLC·Filed 2010·Granted Feb 12, 2013·0 cites·5 claims
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →