Assignee
RAMACHANDRAN BALASUBRAMANIAN
US4 patents
Top patents by PatentIndex Score
US9347132B2May 24, 2016
Optical endpoint detection system
RAMACHANDRAN BALASUBRAMANIAN10 citations83
US8513626B2Aug 20, 2013
Method and apparatus for reducing patterning effects on a substrate during radiation-based heating
RAMACHANDRAN BALASUBRAMANIAN7 citations83
US9127360B2Sep 8, 2015
Epitaxial chamber with cross flow
RAMACHANDRAN BALASUBRAMANIAN3 citations58
US8217574B2Jul 10, 2012
Lamp with internal fuse system
RAMACHANDRAN BALASUBRAMANIAN0 citations40