Assignee
RAMASWAMY KARTIK
US3 patents
Top patents by PatentIndex Score
US8578879B2Nov 12, 2013
Apparatus for VHF impedance match tuning
RAMASWAMY KARTIK7 citations83
US8920597B2Dec 30, 2014
Symmetric VHF source for a plasma reactor
RAMASWAMY KARTIK9 citations82
US8148977B2Apr 3, 2012
Apparatus for characterizing a magnetic field in a magnetically enhanced substrate processing system
RAMASWAMY KARTIK4 citations60