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RANDOLPH STEVEN
US
3 patents
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US9090973B2
Jul 28, 2015
Beam-induced deposition of low-resistivity material
RANDOLPH STEVEN
4 citations
71
US8778804B2
Jul 15, 2014
High selectivity, low damage electron-beam delineation etch
RANDOLPH STEVEN
4 citations
71
US10023955B2
Jul 17, 2018
Seed layer laser-induced deposition
RANDOLPH STEVEN
1 citations
49