Assignee
RASHEED MUHAMMAD
US4 patents
Top patents by PatentIndex Score
US8911601B2Dec 16, 2014
Deposition ring and electrostatic chuck for physical vapor deposition chamber
RASHEED MUHAMMAD8 citations83
US8647485B2Feb 11, 2014
Process kit shield for plasma enhanced processing chamber
RASHEED MUHAMMAD4 citations71
US9834840B2Dec 5, 2017
Process kit shield for improved particle reduction
RASHEED MUHAMMAD1 citations51
US8795488B2Aug 5, 2014
Apparatus for physical vapor deposition having centrally fed RF energy
RASHEED MUHAMMAD1 citations51