Assignee
RASHEED MUHAMMAD M
US·5 granted patents·37 citations·filing 2008–2012
Top patents by PatentIndex Score
5 records- 0193US8968537B2PVD sputtering target with a protected backing plateRASHEED MUHAMMAD M·Filed 2011·Granted Mar 3, 2015·8 cites·20 claims
- 0287US8252410B2Ceramic cover wafers of aluminum nitride or beryllium oxideRASHEED MUHAMMAD M·Filed 2008·Granted Aug 28, 2012·12 cites·19 claims
- 0383US9222172B2Surface treated aluminum nitride baffleRASHEED MUHAMMAD M·Filed 2008·Granted Dec 29, 2015·7 cites·10 claims
- 0482US9087679B2Uniformity tuning capable ESC grounding kit for RF PVD chamberRASHEED MUHAMMAD M·Filed 2012·Granted Jul 21, 2015·5 cites·20 claims
- 0572US8409355B2Low profile process kitRASHEED MUHAMMAD M·Filed 2008·Granted Apr 2, 2013·5 cites·23 claims
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