Assignee
RATH MELISSA K
US·3 granted patents·65 citations·filing 2004–2006
Top patents by PatentIndex Score
3 records- 0193US8951948B2Metal and dielectric compatible sacrificial anti-reflective coating cleaning and removal compositionRATH MELISSA K·Filed 2006·Granted Feb 10, 2015·21 cites·15 claims
- 0292US8058219B2Metals compatible post-etch photoresist remover and/or sacrificial antireflective coating etchantRATH MELISSA K·Filed 2006·Granted Nov 15, 2011·25 cites·20 claims
- 0382US8338087B2Composition and process for post-etch removal of photoresist and/or sacrificial anti-reflective material deposited on a substrateRATH MELISSA K·Filed 2004·Granted Dec 25, 2012·19 cites·41 claims
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