Assignee
RATHSACK BENJAMEN M
US·3 granted patents·57 citations·filing 2010–2012
Top patents by PatentIndex Score
3 records- 0195US8108805B2Simplified micro-bridging and roughness analysisRATHSACK BENJAMEN M·Filed 2010·Granted Jan 31, 2012·33 cites·20 claims
- 0292US9005877B2Method of forming patterns using block copolymers and articles thereofRATHSACK BENJAMEN M·Filed 2012·Granted Apr 14, 2015·11 cites·15 claims
- 0387US8288174B1Electrostatic post exposure bake apparatus and methodRATHSACK BENJAMEN M·Filed 2011·Granted Oct 16, 2012·13 cites·18 claims
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