Assignee
REBSTOCK LUTZ
DE29 patents
Top patents by PatentIndex Score
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Semiconductor cleaner systems and methods
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Methods and apparatuses for roll-on coating
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Semiconductor cleaner systems and methods
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US8753063B2Jun 17, 2014
Removable compartments for workpiece stocker
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Scalable stocker with automatic handling buffer
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Workpiece stocker with circular configuration
REBSTOCK LUTZ22 citations93
US11024526B2Jun 1, 2021
Robot with gas flow sensor coupled to robot arm
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US9633881B2Apr 25, 2017
Automatic handling buffer for bare stocker
REBSTOCK LUTZ9 citations84
US9524892B2Dec 20, 2016
Semiconductor stocker systems and methods
REBSTOCK LUTZ6 citations84
US8888434B2Nov 18, 2014
Container storage add-on for bare workpiece stocker
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US8764370B2Jul 1, 2014
Scalable stockers with automatic handling buffer
REBSTOCK LUTZ10 citations84
US8651539B1Feb 18, 2014
Integrated gripper for workpiece transfer
REBSTOCK LUTZ6 citations84
US8777540B2Jul 15, 2014
Apparatus for storing contamination-sensitive flat articles, in particular for storing semiconductor wafers
REBSTOCK LUTZ16 citations80
US9947565B2Apr 17, 2018
Workpiece stocker with circular configuration
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US9646817B2May 9, 2017
Semiconductor cleaner systems and methods
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US8739728B2Jun 3, 2014
Methods and apparatuses for roll-on coating
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US11443962B2Sep 13, 2022
Integrated handling system for semiconductor articles
REBSTOCK LUTZ0 citations63
US10096461B2Oct 9, 2018
Semiconductor cleaner systems and methods
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US9536763B2Jan 3, 2017
Semiconductor stocker systems and methods
REBSTOCK LUTZ1 citations63
US9122272B2Sep 1, 2015
Redundantable robot assembly for workpiece transfer
REBSTOCK LUTZ2 citations63
US8591664B2Nov 26, 2013
Integrated cleaner and dryer system
REBSTOCK LUTZ4 citations63
US8795785B2Aug 5, 2014
Methods and apparatuses for roll-on coating
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US10090179B2Oct 2, 2018
Semiconductor stocker systems and methods
REBSTOCK LUTZ0 citations52
US10043651B2Aug 7, 2018
Semiconductor cleaner systems and methods
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US9646858B2May 9, 2017
Semiconductor cleaner systems and methods
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US8868229B2Oct 21, 2014
Buffer station for stocker system
REBSTOCK LUTZ0 citations52
US8858723B2Oct 14, 2014
Integrated cleaner and dryer system
REBSTOCK LUTZ0 citations52
US8182198B2May 22, 2012
Redundantable robot assembly for workpiece transfer
REBSTOCK LUTZ0 citations52
US10770323B2Sep 8, 2020
Stackable substrate carriers
REBSTOCK LUTZ0 citations42