Assignee
REVANKAR VITHAL
US·5 granted patents·1 pending application·7 citations·filing 2009–2010
Top patents by PatentIndex Score
6 records- 0180US8657958B2CVD-Siemens monosilane reactor process with complete utilization of feed gases and total recycleREVANKAR VITHAL·Filed 2010·Granted Feb 25, 2014·3 cites·11 claims
- 0274US8399072B2Process for improved chemcial vapor deposition of polysiliconREVANKAR VITHAL·Filed 2009·Granted Mar 19, 2013·3 cites·30 claims
- 0370US8993056B2Method of gas distribution and nozzle design in the improved chemical vapor deposition of polysilicon reactorREVANKAR VITHAL·Filed 2010·Granted Mar 31, 2015·1 cites·7 claims
- 0452US8124039B2Process of silicon tetrafluoride gas synthesisREVANKAR VITHAL·Filed 2009·Granted Feb 28, 2012·0 cites·12 claims
- 0552US7897125B1Silicon tetrafluoride byproduct separation processREVANKAR VITHAL·Filed 2009·Granted Mar 1, 2011·0 cites·9 claims
- 0652US2011206842A1CVD-Siemens Reactor Process Hydrogen Recycle SystemREVANKAR VITHAL·Filed 2010·Application pending·0 cites
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