Assignee
RHEE HYUG-GYO
KR·2 granted patents·2 citations·filing 2010–2012
Top patents by PatentIndex Score
2 records- 0166US9223223B2Apparatus for forming fine patterns capable of switching direction of polarization interference pattern in laser scanning method and method of forming fine patterns using the sameRHEE HYUG-GYO·Filed 2010·Granted Dec 29, 2015·2 cites·9 claims
- 0236US9707714B2Apparatus and method for manufacturing fine pattern using interferogram of optical axis directionRHEE HYUG-GYO·Filed 2012·Granted Jul 18, 2017·0 cites·5 claims
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