Assignee

RICCI ANTHONY

US·2 granted patents·67 citations·filing 2010–2010

Technology mixH01J2 H10P2 C23C1 H01L1 Y10T1

Top patents by PatentIndex Score

2 records

0191US9728429B2Parasitic plasma prevention in plasma processing chambersRICCI ANTHONY·Filed 2010·Granted Aug 8, 2017·51 cites·15 claims
0290US8410393B2Apparatus and method for temperature control of a semiconductor substrate supportRICCI ANTHONY·Filed 2010·Granted Apr 2, 2013·16 cites·24 claims

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