Assignee
RIEPEN MICHEL
NL6 patents
Top patents by PatentIndex Score
US8547523B2Oct 1, 2013
Fluid handling structure, lithographic apparatus and device manufacturing method
RIEPEN MICHEL28 citations92
US8634053B2Jan 21, 2014
Lithographic apparatus and device manufacturing method
RIEPEN MICHEL12 citations82
US8614784B2Dec 24, 2013
Fluid handling structure, lithographic apparatus and device manufacturing method, involving gas supply
RIEPEN MICHEL14 citations82
US9140995B2Sep 22, 2015
Fluid handling structure, a lithographic apparatus and a device manufacturing method
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US8804094B2Aug 12, 2014
Lithographic apparatus and a device manufacturing method
RIEPEN MICHEL0 citations52
US9625828B2Apr 18, 2017
Fluid handling structure, lithographic apparatus and device manufacturing method
RIEPEN MICHEL0 citations49