Assignee
ROGERS MATTHEW S
US·3 granted patents·10 citations·filing 2011–2012
Top patents by PatentIndex Score
3 records- 0180US10049881B2Method and apparatus for selective nitridation processROGERS MATTHEW S·Filed 2012·Granted Aug 14, 2018·4 cites·7 claims
- 0278US8994089B2Interlayer polysilicon dielectric cap and method of forming thereofROGERS MATTHEW S·Filed 2011·Granted Mar 31, 2015·4 cites·15 claims
- 0371US8765234B2Electron beam plasma chamberROGERS MATTHEW S·Filed 2012·Granted Jul 1, 2014·2 cites·9 claims
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