Assignee
ROHRMANN HARTMUT
DE·1 granted patent·3 pending applications·12 citations·filing 2005–2011
Top patents by PatentIndex Score
4 records- 0180US9587306B2Method for producing a directional layer by cathode sputtering, and device for implementing the methodROHRMANN HARTMUT·Filed 2008·Granted Mar 7, 2017·12 cites·15 claims
- 0234US2013180850A1Magnetron sputtering apparatusROHRMANN HARTMUT·Filed 2011·Application pending·0 cites
- 0331US2005205412A1Sputtering device for manufacturing thin filmsROHRMANN HARTMUT·Filed 2005·Application pending·0 cites
- 0430US2006054495A1Substrate processing systemROHRMANN HARTMUT·Filed 2005·Application pending·0 cites
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