Assignee
RORZE CORP
JP25 patents
Top patents by PatentIndex Score
US7704036B2Apr 27, 2010
Drive source and transportation robot
RORZE CORP24 citations93
US7086822B2Aug 8, 2006
Scalar type robot for carrying flat plate-like object, and flat plate-like object processing system
RORZE CORP41 citations93
US7933665B2Apr 26, 2011
Method and system for teaching reference position of semiconductor wafer in automated wafer handling manufacturing equipment
RORZE CORP29 citations90
US7635244B2Dec 22, 2009
Sheet-like electronic component clean transfer device and sheet-like electronic component manufacturing system
RORZE CORP27 citations89
US7606633B2Oct 20, 2009
Robot simulation device, and robot simulation program
RORZE CORP11 citations82
US7425783B2Sep 16, 2008
Linear motor
RORZE CORP12 citations81
US9437466B2Sep 6, 2016
Storage container, shutter opening/closing unit of storage container, and wafer stocker using storage container and shutter opening/closing unit
RORZE CORP9 citations80
US10354903B2Jul 16, 2019
Load port and load port atmosphere replacing method
RORZE CORP7 citations76
US7695234B2Apr 13, 2010
Device for temporarily loading, storing and unloading a container
RORZE CORP15 citations76
US7115891B2Oct 3, 2006
Wafer mapping device and load port provided with same
RORZE CORP12 citations76
US9275886B2Mar 1, 2016
Device and method for detecting position of semiconductor substrate
RORZE CORP6 citations72
US7954624B2Jun 7, 2011
Shuttle type conveying device, microplate feeding and collecting device, pickup device for microplate, cassette for microplate, and shelf for containing microplate
RORZE CORP6 citations69
US7749920B2Jul 6, 2010
Low dielectric constant films and manufacturing method thereof, as well as electronic parts using the same
RORZE CORP5 citations68
US7315373B2Jan 1, 2008
Wafer positioning method and device, wafer process system, and wafer seat rotation axis positioning method for wafer positioning device
RORZE CORP8 citations60
US12557598B2Feb 17, 2026
Load port
RORZE CORP1 citations54
US12020969B2Jun 25, 2024
Aligner and correction value calculation method for aligner
RORZE CORP1 citations52
US11688617B2Jun 27, 2023
Electrostatic capacitance sensor
RORZE CORP0 citations51
US11227784B2Jan 18, 2022
Thin plate substrate-holding device and transfer robot provided with this holding device
RORZE CORP0 citations50
US11232964B2Jan 25, 2022
Pod opener
RORZE CORP0 citations48
US11107722B2Aug 31, 2021
Thin-plate substrate holding finger and transfer robot provided with said finger
RORZE CORP0 citations48
US12387959B2Aug 12, 2025
Transport device having local purge function
RORZE CORP0 citations47
US12275601B2Apr 15, 2025
Wafer transfer apparatus and wafer transfer method
RORZE CORP1 citations45
US12327746B2Jun 10, 2025
FOUP transfer device
RORZE CORP0 citations43
US11513000B2Nov 29, 2022
Waveform analysis device and waveform analysis method
RORZE CORP0 citations41
US8348583B2Jan 8, 2013
Container and loader for substrate
RORZE CORP0 citations37