Assignee
ROY SHAMBHU N
US·4 granted patents·66 citations·filing 2009–2012
Top patents by PatentIndex Score
4 records- 0195US9447499B2Dual plenum, axi-symmetric showerhead with edge-to-center gas deliveryROY SHAMBHU N·Filed 2012·Granted Sep 20, 2016·24 cites·19 claims
- 0294US8559159B2Electrostatic chuck and methods of use thereofROY SHAMBHU N·Filed 2011·Granted Oct 15, 2013·21 cites·20 claims
- 0392US9337067B2High temperature electrostatic chuck with radial thermal chokesROY SHAMBHU N·Filed 2012·Granted May 10, 2016·17 cites·38 claims
- 0471US9064911B2Heated cooling plate for E-chucks and pedestalsROY SHAMBHU N·Filed 2009·Granted Jun 23, 2015·4 cites·17 claims
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