Assignee
RUELKE HARTMUT
DE·3 granted patents·8 citations·filing 2004–2010
Top patents by PatentIndex Score
3 records- 0169US8772178B2Technique for forming a dielectric interlayer above a structure including closely spaced linesRUELKE HARTMUT·Filed 2005·Granted Jul 8, 2014·5 cites·29 claims
- 0251US8557667B2Spacer for a gate electrode having tensile stress and a method of forming the sameRUELKE HARTMUT·Filed 2004·Granted Oct 15, 2013·3 cites·15 claims
- 0337US8415257B2Enhanced adhesion of PECVD carbon on dielectric materials by providing an adhesion interfaceRUELKE HARTMUT·Filed 2010·Granted Apr 9, 2013·0 cites·18 claims
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