Assignee

RYOKAWA ATSUSHI

JP·1 granted patent·0 citations·filing 2009–2009

Technology mixC07C1 C07F1 C23C1

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1 record

0147US8680308B2Hafnium amide complex manufacturing method and hafnium-containing oxide filmRYOKAWA ATSUSHI·Filed 2009·Granted Mar 25, 2014·0 cites·1 claims

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