Assignee

SAIFULLAH M S M

SG·1 granted patent·0 citations·filing 2010–2010

Technology mixB29C1 B82Y1 G03F1

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1 record

0122US9904165B2Method of reducing the dimension of an imprint structure on a substrateSAIFULLAH M S M·Filed 2010·Granted Feb 27, 2018·0 cites·19 claims

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