Assignee
SAITO TATSUYUKI
JP·6 granted patents·1 pending application·24 citations·filing 2009–2013
Top patents by PatentIndex Score
7 records- 0191US8808455B2Substrate processing apparatus and method of manufacturing semiconductor deviceSAITO TATSUYUKI·Filed 2011·Granted Aug 19, 2014·14 cites·8 claims
- 0279US8618712B2Electric motor and reduction motorSAITO TATSUYUKI·Filed 2013·Granted Dec 31, 2013·3 cites·15 claims
- 0374US8436505B2Electric motor and reduction motorSAITO TATSUYUKI·Filed 2009·Granted May 7, 2013·5 cites·6 claims
- 0466US8941283B2Electric motor and reduction motorSAITO TATSUYUKI·Filed 2013·Granted Jan 27, 2015·1 cites·8 claims
- 0564US9466477B2Method of manufacturing semiconductor device, substrate processing apparatus, and semiconductor deviceSAITO TATSUYUKI·Filed 2010·Granted Oct 11, 2016·1 cites·8 claims
- 0656US8643247B2Electric motor and reduction motorSAITO TATSUYUKI·Filed 2013·Granted Feb 4, 2014·0 cites·6 claims
- 0737US2012280369A1Method for manufacturing semiconductor device, substrate processing apparatus, and semiconductor deviceSAITO TATSUYUKI·Filed 2010·Application pending·0 cites
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